I.
1. Introduction to IC Fabrication
2. Semiconductor Basics
3. Wafer Manufacturing
4. Thermal Processes
5. Photolithography
6. Plasma Basics
7. Ion Implantation
8. Etch
9. CVD and Dielectric Thin Film
10. Metallization
11. CMP
12. Process Integration
13. CMOS Process
14. Nano-Scale VLSI Process

II. “Introduction to Semiconductor Manufacturing Technology”
III. Mid-term exam: 30%; Final exam: 40%; Home work: 30%IV. None